According to foreign media reports, Lam Research launched the first production-type pulsed laser deposition (PLD) tool to implement a new generation of microelectromechanical systems (MEMS)-based microphones and radio frequency (RF) filters.
Lam’s Pulsus ™ PLD system offers aluminum scandium nitride (AlScN) thin films with the highest scandium content available today, paving the way for advanced consumer and automotive devices with enhanced performance, capacity and functionality.
Pulsus is now shipped to select specialized equipment manufacturers.
, (Credit: Fanlin Group), Lam added Pulsus PLD to its portfolio, further expanding its portfolio of special-focused deposition, etching and wafer cleaning products, as well as the company’s continued innovation in this area.
, Chris Carter, Vice President and Group General Manager of Customer Support, Fanforest Group, said:”With deep expertise in specialty semiconductor technologies, proven capabilities in deposition, and a strategic partnership with the French Atomic Energy Commission Electronics and Information Technology Laboratory (CEA-Leti), the company brings this transformative solution to its customers on the production-proven 2300 ® platform.
This new deposition technology helps to advance equipment design and accelerate product roadmap development for specialty markets.
“, Through advanced thin film drive high performance equipment, Back to Home>,.
